논문 제목: Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET
Journal: Nanotechnology Author(s): Kookjin Lee1, Yeonsu Kim2, Hyebin Lee3, So Jeong Park2 Yongwoo Lee4 Minkyu Joo5 Hyunjin Ji6 Jaewoo Lee2, Jungu Chun3, Moonsoo Sung7, Young-Hoon Cho3, Doyoon Kim8, Junhee Choi9, Jae Woo Lee10 Daeyoung Jeon11 Sung-Jin Choi12and Gyu-Tae Kim13
DOI: https://doi.org/10.1088/1361-6528/abd278
사사: GAA |